Abstract

X-ray micro/nano tomography is a powerful tool to reveal inside structures of a sample, either an IC chip or a porous material. A challenge in X-ray tomography is to select a correct threshold to ensure the reconstructed models as close to the reality as possible. This paper presents a study to use scanning electron microscope (SEM) images as references for threshold tuning of X-ray micro/nano computed tomography reconstruction. In the research, a GDL layer was scanned using X-ray micro and nano tomography systems. The reconstructed binary images generated from X-ray tomography contain 3D geometric information from the surface to the inside of the layers. In the reconstruction, high resolution SEM images were used to provide the pore sizes of GDL layer. In reference to the features of SEM images, carbon fibre were compared with the reconstructed surface of that feature from X-ray tomography data and provided threshold estimation for reconstruction of the whole structure. Pore size and continuity of the material from both the CT reconstruction and SEM images were analyzed for obtaining the optimum reconstruction.

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