Abstract
A multiple beam electrode system (MBES) is used to provide focused ion beamlets of elements from a compact microwave plasma. In this study, a honeycomb patterned plasma electrode with micron size apertures for extracting ion beamlets is investigated. The performance of the MBES is evaluated with the help of two widely adopted and commercially available beam simulation tools, AXCEL-INP and SIMION, where the input parameters are obtained from our experiments. A simple theoretical model based upon electrostatic ray optics is employed to compare the results of the simulations. It is found that the results for the beam focal length agree reasonably well. Different geometries are used to optimize the beam spot size and a beam spot ∼5–10 μm is obtained. The multiple ion beamlets will be used to produce microfunctional surfaces on soft matter like polymers. Additionally, the experimental set-up and plans are presented in the light of above applications.
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