Abstract
A high-resolution, high-speed microforce sensing method using a simple displacement sensor with coupled-cavity-laser is presented. A resolution of 0.5mN is achieved for frequencies up to 3kHz using a leaf spring with a stiffness coefficient of 500mN/μm. This method has been applied to detecting micro-frictional forces for micromechanical systems. The microscopic static- and kinetic-frictional forces have been measured and estimated under various magnitudes of load, neglecting the force of inertia.
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