Abstract

This paper reviews recently demonstrated microfabricated phononic crystals, with focus on two-dimensional phononic crystal slab structure to be operated in GHz frequency range and micromechanical resonators with high Q factor based on phononic micro-cavities, both with transducers integrated on chip for applications such as RF communications and sensing.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call