Micromechanical Resonators: AlN/3C–SiC Composite Plate Enabling High‐Frequency and High‐Q Micromechanical Resonators (Adv. Mater. 20/2012)

Abstract

An AlN/3C–SiC composite is used to realize high-frequency and high-Q acoustic wave resonators by exploiting the third-order quasi-symmetric (QS3) Lamb wavemode, as described by C.-M. Lin, Y.-Y. Chen, and co-workers on page 2722. The epitaxial 3C–SiC layer enhances the electromechanical coupling of the QS3 mode and boosts the Q due to the intrinsic low acoustic loss of SiC crystals. This AlN/3C–SiC composite plate structure enables production of high-performance micromechanical acoustic wave resonators for frequency control and sensing applications.