Micromachining with tailored nanosecond pulses

Abstract

Fiber lasers in MOPA configuration are a very flexible tool for micromachining applications since they allow to independently adjust the pulse parameters such as pulse duration, repetition rates and pulse energy while maintaining a constant beam quality. The developed fiber laser provides an average power of 11 W and maximum pulse energy of 0.5 mJ for a wide range of pulse parameters at diffraction limited beam quality. Its pulse duration and repetition rate are continuously adjustable from 10 ns to cw and from 10kHz to 1MHz respectively. Ablation experiments were carried out on stainless steel, nickel and silicon with the goal of optimizing removal rates or surface finish using nanosecond pulses of different parameters. Maximum removal rates are achieved on all three materials using relatively similar pulse parameters. For silicon, pulse duration of 320ns at 100kHz and 45mJ resulted in optimum removal. In single shot experiments on silicon a significant influence of the pulse duration was found with a distinct optimum for removal rate and surface finish. The optimum intensity at the work piece is in the range of 35MW/cm² to 70MW/cm². Lower values are below the ablation threshold, while the plasma shielding effect limits considerable increases in removal rates for intensities exceeding 70MW/cm ².