Abstract
Excimer lasers can be used to machine metals, ceramics and polymers. UV radiation with short pulses of several 10 ns and intensities much higher than those of other sources allow machining with minimum thermal influence. The high photon, energy of excimer laser radiation facilitates a direct photolytic interaction with the material. Besides this thermal and pyrolytic interaction mechanisms also appear. Concidering on this, the removal mechanisms of certain materials are discussed. The application of excimer laser radiation in a multiaxis CNC-micromachining unit with modular design is presented. Special features of this micromachining center are the beam handling system with integrated flexible mask and energy control. The workpiece handling and all process parameters are controlled by a host computer with ergonomic user interface. The unit can be used to generate microstructures in ceramic and polymer surfaces. Furthermore, it is possible to produce micromechanical parts of these materials, also in fibre reinforced plastics.
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