Abstract
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d33*~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.
Highlights
Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) and other relaxor-based ferroelectric crystal materials have drawn extensive interest in the development of high-frequency (>20 MHz) ultrasonic array transducers [1,2,3]
In comparison with the damages caused by mechanical dicing [9], laser micromachining has greater potential for retaining the ultrahigh piezoelectric performance of the micron-size single crystals oMficProMmaNch–in3e1s%20P20T,.11, x
These results reveal that laser micromachining of PMN– 31%PT at optimized parameters has a minimal effect on the microdomain near the kerf (
Summary
Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) and other relaxor-based ferroelectric crystal materials have drawn extensive interest in the development of high-frequency (>20 MHz) ultrasonic array transducers [1,2,3]. The PMN–PT wafers are known to be prone to chipping and forming micro-cracks during the traditional dicing process [5,9,10] Such defects would substantially degrade the piezoelectric properties of PMN–PT, considerably reducing the bandwidth and sensitivity of transducers [9,10]. The effects of the small (20 MHz) array transducers. The effective piezoelectric coefficient (d33*) is further tested, quantitatively confirming that the high piezoresponse of PMN–31%PT is maintained even after micromachining
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