Micromachining of an SU-8 flapping-wing flying micro-electro-mechanical system

Abstract

This paper presents a feasibility step in the development of an ultra-small biomimetic flying machine. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. To achieve this goal, a flapping-wing flying MEMS concept and design inspired from insects is first described. Actuators and an actuation way for the control over the wing kinematics are proposed. The initial concepts are subsequently analyzed and presented using multi-body and finite element models. An overview of SU-8 photoresist structures and their functions in the future micro-robot insect is then presented. Consequently, micromachining enables the implementation of a flying MEMS. It is also demonstrated that the structure can be made at insect sizes and actuated at low power inputs. Moreover, the flapping frequency obtained is within the flapping frequency range of wings of many common insects of millimetric dimensions. Such prototypes are of interest as tools to artificially recreate and study insect flight with characteristics, similar to those of insects, that are able to produce lift and hover. Finally, if a micro-battery, wireless receivers, microcontrollers, sensors and actuators can all be fitted onto chips only a few millimeters square, with a mass in the order of milligrams, then we believe that an insect-size flying MEMS can be realized. All these requirements can now be achieved due to advanced engineering methods.