Abstract
Microgrooves were fabricated on aluminum surfaces using anodizing, laser irradiation, and electrochemical etching. Aluminum specimens covered with porous type oxide films were irradiated with a pulsed Nd-YAG laser in distilled water to remove the anodic oxide films locally. The subsequent electrochemical etching in CH3COOH / HClO4 solution made the grooves formed by the laser irradiation smoother. The width and the depth of the grooves increased with electrochemical etching time. Mesh-like micro-patterns with 70 µm width and 30 µm depth were fabricated on aluminum surfaces by consecutive processes of anodizing, laser irradiation, and electrochemical etching.
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