Abstract
Miniaturization of chemical sensors and biosensors has been developed by three-dimensional microfabrication technologies based on photolithography commonly used in integrated circuits—called micromachining. Biosensors based on ion sensitive field effect transistor (ISFET) are examples of such devices.’ Microflow control devices of microvalves, micropumps, and microflow sensors have also been fabricated by micromachining 2 Such microdevices open new possibilities for the miniaturization of conventional chemical and biochemical analysis systems. Micro total analysis systems (µTAS) including microfabricated detectors (silicon-based electrochemical or optical sensors), microflow control devices, and even control/ detection circuits comprise one of the recent main areas of interest in the microelectromechanical systems (MEMS) field. Miniaturized flow injection analysis (FIA) and liquid chromatography systems have been demonstrated using microfabricated elements.34 An analytical system based on enzyme-linked immunosorbent assay (ELISA) using ISFET was also demonstrated.’ Micromachining is also used to fabricate DNA analysis systems using a polymerase chain reaction (PCR) process.6,7
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