Abstract
Two-dimensional ultrasonic transducers and delay lines fabricated on micromachined LiTaO3 and LiNbO3 plates are demonstrated. The 0.5-mm-thick commercial wafers are inversely poled by applying an external electric field to get periodic and aperiodic multidomain structures. The metal electrodes are deposited on the structures to excite ultrasonic vibrations by applying radio frequency voltage. The domain lengths are in a broad range from 16 μm to 1 mm with corresponding frequencies from 347 to 3 MHz. The finite element method is used for computer simulation of the micromachined transducers. Experimental results are in agreement with theoretical calculations. All transducers have a so called domain resonance and operate at frequencies near this resonance. The highest vibration amplitude is usually observed when acoustic wavelength is two times greater than a single domain length. The multidomain structures have their own nonclassical nonlinear properties, which may be explained by domain kinetics and their ...
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