Micromachined thin film SnO 2 gas sensors in temperature-pulsed operation mode

Abstract

Gas detection measurements based on a micromachined SnO 2 gas sensor with periodically pulsed heater voltage are presented. Additionally, the field-effect-induced changes in resistivity of the sensitive layer caused by the heater voltage were investigated. The combination of both results leads to an improved design for low power SnO 2 gas sensors. In temperature-pulsed mode, the sensor resistances were measured at constant delays after the pulse edges. The measurements were carried out with the common test gases carbon monoxide and nitric dioxide in synthetic air with 50% humidity. In the cold pulse phase, the CO sensor response is higher and shows only a slow decrease with increasing pulse duration. The sensor sensitivity is related to the pulsed heated mode, on the one hand, and the continuously heated, on the other. The comparison of the measurement results reveals that the temperature-pulsed operation mode (TPOM) caused a significant reduction of power consumption and higher sensitivity.