Abstract
We have developed a micro local heating device for bio applications using micro-electro-mechanical systems (MEMS) technology. The device has a two-dimensional microdish array, which contains a series of diodes. The microdish array is fabricated by means of a combination of complementary metal–oxide–semiconductor (CMOS) technology and MEMS post-processing. The microdish array has a miniature cavity for thermal separation from substrate. These microdish arrays can be generated by a large forward current based on Joule heating. In this paper, we describe the direct heating of the whole microdish array and just an arbitrary portion of the microdish consisting of the device by Joule heating. In the localized selective heating, the highest temperature, 62.6 °C, from all the dishes was confirmed. More than twice the heat effect was achieved in heating an arbitrary portion compared with heating the whole microdish.
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