Abstract
Abstract The techniques of micromachining silicon are used for the manufacturing of a thermal accelerometer. This sensor requires no solid proof mass and has a low cost production. A heating resistor creates a symmetrical temperature profile and two temperature detectors are placed on both sides. When an acceleration is applied, the temperature profile becomes asymmetric and the two detectors measure the differential temperature. Platinum resistors deposited by electron beam evaporation on a SiN x membrane are used as heater and temperature sensors. This paper presents measurements of temperature profile and sensitivity according to the distance heater–detector, power supplied and room temperature. It shows that the sensitivity is proportional to the heating power and decreases when the room temperature increases. Experimental results in tiltmeter utilization and in a centrifuge are also presented. A 3 dB bandwidth of 20 Hz is measured applying a sinusoidal acceleration and the equivalent acceleration noise is found to be 0.3 mg RMS.
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