Micromachined RF MEMS tunable capacitors using piezoelectric actuators

J.Y Park,J.U Bu,H.J Nam,Y.J Yee

doi:10.1109/mwsym.2001.967330

Micromachined RF MEMS tunable capacitors using piezoelectric actuators

J.Y Park, J.U Bu + Show 2 more

https://doi.org/10.1109/mwsym.2001.967330

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Publication Date: May 20, 2001

Citations: 53

Affiliation: LG Corporation (South Korea)

#RF MEMS Tunable Capacitors #Large Tuning Ratio + Show 8 more

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Abstract

In this paper, RF MEMS tunable capacitors with low operation voltage, high linearity, high quality factor, and large tuning ratio have been fabricated by utilizing micromachined piezoelectric actuators. The fabricated tunable capacitor has a C/sub max//C/sub min/ ratio of 3.1 to 1 at bias voltages of 6 V and a quality factor of 210 at 1 GHz.

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