Micromachined probe performance assessment

Abstract

In recent years, Capacitive Micromachined Ultrasound Transducer (CMUT) technology was widely investigated and functional prototypes have been released by several R&D teams. CMUT technology offers outstanding characteristics in acoustic, interconnect packaging capabilities or in integration features that are exciting criteria for new medical applications. We propose a full acoustic characterization report of a CMUT probe. A linear array was fully packaged with electronic preamplifier boards integrated. A complete acoustic characterization of the probe is then performed and presented. In a second phase, a linear probe with piezocomposite technology is realized. The conception is done in regard to the geometric characteristics and to the acoustic response of the micromachined probe. Then an electro‐acoustical benchmark CMUT / piezocomposite is realized in the closest conditions. Using a commercial ultrasound imaging platform, an image assessment is performed. The images are first analysed in a quantitative way with a tissue mimicking phantom, using a computerized tool who considered imaging parameters such as contrast, resolution or signal to noise ratio. In a second way, a clinical perspective is discussed with in vivo images.