Abstract
This paper describes characterization of a thickness extensional mode in a piezoelectrically driven MEMS composite AlN-on-Si membrane resonator. The measured resonant frequency for the mode closely matches the analytical prediction for the fundamental half-wavelength thickness extensional mode through the entire thickness of the composite membrane. The mode has been measured across a variety of devices corresponding to differing membrane geometriesand boundary conditions. For co-located devices the measured frequency of the composite membrane thickness extensional mode is found to be highly reproducible, with a standard deviation of 0.5% or less in the measured frequency device to device. Finally, the mode is compared in vacuum, air, and water for one device. Only very slight damping occurs transitioning from vacuum to air, however operation in water results in the response being significantly damped.
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