Abstract

The authors describe a micromachined force sensor that is able to measure forces as small as 1pN in both air and water. First, they measured the force field produced by an electromagnet on individual 2.8μm magnetic beads glued to the sensor. By repeating with 11 different beads, they measured a 9% standard deviation in saturation magnetization. They next demonstrated that the sensor was fully functional when immersed in physiological buffer. These results show that the force sensors can be useful for magnetic force calibration and also for measurement of biophysical forces on chip.

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