Abstract

A passive MEMS magnetostatic relay using only one electroplated magnetic layer was presented. The relay consists of an electroplated Ni 80 Fe 20 plate supported by a pair of torsion bars from two sides. The relay is actuated by approaching an external magnet to the relay. The switching-on magnetic field is about 4.8 mT and the contact resistance is about 3 Ohms with gold contact. The lifetime testing shows more than 7.5 million hot switching cycles with 1–2 mA current. This passive magnetic relay could find applications in portable electronics, such as cellular phones, personal data assistant (PDA), pace makers, hearing aids, etc.

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