Abstract
This work presents a novel approach for a miniaturized optical scanning module based on lateral and piston motion of two commercial lenses by MEMS actuation. Two aspheric glass lenses of 1 mm diameter are assembled on two electrostatically actuated microstages moving along perpendicular axes to tilt optical path. The compact integration secures the effective beam aperture of 0.6 mm within the device width of 2 mm. The lens mass provides high-Q motions at low operating voltages of DC 5 V and AC 10 V, i.e., the lateral angle of 4.6 degrees at 277 Hz and the vertical angle of 5.3 degrees at 204 Hz. The device can provide a new direction for miniaturizing laser scanning based endoscopes or handheld projectors.
Highlights
Optical scanning plays functional roles in many applications including optical sensing, imaging, and display devices
This work presents a novel approach for a miniaturized optical scanning module based on lateral and piston motion of two commercial lenses by microelectromechanical system (MEMS) actuation
Two aspheric glass lenses of 1 mm diameter are assembled on two electrostatically actuated microstages moving along perpendicular axes to tilt optical path
Summary
Optical scanning plays functional roles in many applications including optical sensing, imaging, and display devices. The MEMS mirror or lens based previous works require relatively large space compared to the effective clear aperture size due to the in-plane configuration of all the optical and mechanical components. They entail precise alignment between multiple optical components in vertical assembly under an optical microscope. The microstage thickness and the lens diameter determine the front dimension along the optical axis This configuration helps increment of the clear aperture within a given space so that it can provide a capability for higher numerical aperture. The lens integration can offer high mechanical Q-factor at low operating voltage
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