Abstract
PurposeThis document presents the study of a one‐dimensional thermal inclinometer based on free convection.Design/methodology/approachA micromachined one is used. The sensitivity of the sensor is optimized in a close chamber containing CO2 gas under pressure.FindingsBy using this type of sensor in a close chamber containing CO2 gas under pressure, the sensitivity increase and the response time decrease when the pressure increase. High resolution will be achieved.Research limitations/implicationsHigh shock reliability.Practical implicationsMeasuring μg acceleration.Originality/valueLow cost production.
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