Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Abstract

A new microfabrication technology for high-aspect- ratio parylene structure has been developed for soft spring applications. Free-standing parylene beams with widths of 10–40 $mu m$ and aspect ratios of 10–20 have been successfully fabricated. Since parylene has a small Young's modulus, a high-aspect-ratio beam with a spring constant of the order of $1,times, 10 ^-3~ N/ m$ has been realized. The large yield strain of parylene enables a test structure to have a large-amplitude oscillation of 600 $mu m _ pmathchar702D p$ , without any failure of the high-aspect-ratio springs. An early prototype of in-plane capacitive accelerometer was also developed. It was found that its resonant frequency is as low as 37 Hz, and the noise spectral density is 64 $mu g/( Hz)^0.5$ .1606