Micromachined GaAs/AlGaAs Resonant-Cavity Light Emitter with Small Temperature Dependence of Emission Wavelength

Abstract

We present the design of novel micromachined vertical-cavity light emitters/lasers with a thermal strain control layer for temperature-insensitive operations. The temperature dependence of a resonant wavelength can be freely controlled in a micromachined cantilever structure. We demonstrated a micromachined resonant-cavity light emitter with a small temperature dependence of the emission wavelength. The temperature dependence was as small as +0.015 nm/K, which is five times smaller than that of conventional single-mode lasers.