Abstract
Abstract A capacitive accelerometer has been fabricated from Si 110 wafers using the silicon micromachining technique. The sensor basically consists of an elastically suspended plate between two fixed capacitor plates, forming a differential capacitor. The central plate is equipped with several slits, which reduces the air damping and enhances the dynamic behaviour. A sensor with a sufficient number of slits detects accelerations up to 1000 Hz with a signal deviation of less than 10%, while a sensor with no slits reaches the same deviation already around 50 Hz. The experimental data have been fitted with the theoretical curve, and the damping and resonance frequency are determined for different numbers of slits.
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