Abstract
This paper presents a compact ac/dc electric field sensor with adjustable sensitivity and measurement range. The sensor is fabricated using an SOI micromachining process, and consists of a metallized membrane supported by micro-springs. The sensor operates by monitoring membrane displacement due to incident electric fields. Unlike field mills, this sensor does not have rotating parts, avoiding associated wear and maintenance issues. High sensitivity is achieved by using a laser position monitoring system. Modulation of the incident electric field with a bias voltage on the sensing membrane is used to give the sensor a wide measurement range, from sub-1V/m to MV/m. Bench top experimental measurements with both dc and ac fields demonstrated a resolution of 0.1V/m and sensitivity of 180mV/(V/m), with the sensor operating at resonance. Measurements under 20kV simulated power line 75cm from the sensor demonstrated a resolution of 17V/m and sensitivity of 360mV/(kV/m).
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
