Abstract
An opto-micro-engine is proposed as the actuator of a micro-machine. The engine is composed of a vacuum chamber, a micro-rotor, and optical beam generation devices such as laser-beam generators. The rotor has 4 blades. The blade length of the rotor is reduced to 1 mm. The blade is made of aluminium. The 1 surface of the blade is coated with carbon-black powder. At low gas-pressure conditions, the engine is rotated by the effects of the rarefied gas dynamics. The effects are induced by heating, with laser beam irradiation, the carbon-coated blade surfaces of the micro-rotor. In this paper, the properties of the engine are revealed by experimental results. The maximum rotational rate was measured at the pressure of 0.1 Torr. Moreover, the maximum of the static torque of the micro-engine occurred at 0.2 Torr.
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