Microlens Array Fabrication by Using a Microshaper.

Meng-Ju Lin,Cheng Hao Wen

doi:10.3390/mi12030244

Abstract

A simple, easy, inexpensive, and quick nonsilicon-based micromachining method was developed to manufacture a microlens array. The spherical surface of the microlens was machined using a microshaper mounted on a three-axis vertical computer numerical control (CNC) machine with cutter-path-planning. The results show the machined profiles of microlens agree well with designed profiles. The focus ability of the machined microlens array was verified. The designed and measured focal lengths have average 1.5% error. The results revealed that the focal lengths of micro lens agreed with the designed values. A moderate roughness of microlens surface is obtained by simply polishing. The roughness of the lens surface is 43 nm in feed direction (x-direction) and 56 nm in path interval direction (y-direction). It shows the simple, scalable, and reproducible method to manufacture microlenses by microshaper with cutter-path-planning is feasible.

Highlights

Micro-optoelectromechanical systems (MOEMSs) [1,2] are a critical category of microelectromechanical systems
Discussions hour and half to manufacture the array of 5 × 6 micro spherical lenses by computer numerical control (CNC) machine withThe cutter-path planning
7b,cIt costs reveals the array of 5 × 6 micro spherical lenses of 4-mm radius of curvature

Summary

Introduction

Micro-optoelectromechanical systems (MOEMSs) [1,2] are a critical category of microelectromechanical systems. Recent developments show microlenses have more specific and novel applications. The micro lenses can be used in Mirau interferometers [9], imaging scanners [10], integrated photonic platform [11], vertical cavity surface emitting lasers beam shaping [12], etc. Microlenses play more important role in MOEMSs. Traditionally, techniques for manufacturing microlenses often involved silicon-based micromachining. Microlenses can be fabricated by injecting droplets from microjets and solidifying the droplets to form lens surfaces [13]. Photomask lithography with LIGA-like manufacturing is used to fabricate microlenses [14]. Reactive-ion etching with modified parameters [15] and the reflow method are used to fabricate microlenses

Methods

Results

Conclusion