Abstract
Special high temperature Si/SiN based micro-hotplates were used as a platform for preparation and testing of SOFC cathode thin films. The micro-hotplates consist of a free standing SiN film (1 μm thick) spanning over an area of 1 mm2. These membranes withstand thermal stresses up to a maximum temperature of 800 {degree sign}C and several hours of operation at 600{degree sign}C. On top of the membrane a 500 nm thick La0.6Sr0.4Co0.2Fe0.8O3 (LSCF) thin film was deposited by spray pyrolysis. This amorphous film crystallized around 600{degree sign}C. The microstructure and the electrical conductivity of the LSCF was characterized and measured on the micro-hotplate as a function of temperature. Very fast heating and cooling rates of several 100{degree sign}C/min were obtained enabling fast thermal cycling tests. This technology eventually should enable the integration of an electrolyte and an anode with gas channels forming a micro- SOFC on a micro-hotplate with an integrated heating system for start up operation.
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