Abstract
We developed micro-focusing Kirkpatrick-Baez (K-B) mirror optics for the X-ray free electron laser (XFEL) at the SPring-8 Angstrom Compact free electron Laser (SACLA) facility in Japan. The K-B focusing mirrors have a spatial acceptance of 600 × 600 μm2 and ultra-precision surfaces. A manipulator for precise alignment of the mirrors was also developed. The focusing properties for 10-keV X-rays were evaluated with a wire-scanning method. The focal beam size was determined to be 0.95 μm × 1.20 μm at the full width at half maximum. An increased power density of 1018 W/cm2 was achieved at the focal point. These properties were confirmed to be in good agreement with the designed value.
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