Abstract
Micro-Electro-Mechanical Systems (MEMS) is an integrated electromechanical system where the feature size and operating range of the components are on a micro-scale. Unlike traditional mechanical processing, the production of the MEMS device uses semiconductor manufacturing, which includes surface microprocessing and bulk microprocessing, which can be compatible with an integrated circuit. These devices or systems have the ability to detect, control, activate, and create macro-scale effects. In this study, a 3-channel microfluidic channel design was realized by using the SolidWorks program, which is a 3D design program, to realize a microfluidic chip design. The preliminary physical tests and investigation of this microfluidics were made using the Comsol Multiphysics program and necessary time-dependent pressure tests. In this study, it is aimed to understand the pressure and speed values of the microfluidic chip according to the analysis. As a result of the analysis, it was found that the microfluidic chip has a maximum pressure of 6.1 Pa and a speed of 2.36×1014 mm/s.
Highlights
The development of semiconductor technologies, companies working in this field have entered the race to reduce their production further and laid the foundations of today’s Microelectromechanical systems using different production methods
It is defined as a group of canals or an integrated circuit in which channels through which fluid, air or heat pass through microfluidic channels range from a few μm to several mm
In the late 1990s, microfluidic devices were created for cell biology applications such as cell and protein separation modelling, cell-based biosensors, culture and research [3, 4]
Summary
The development of semiconductor technologies, companies working in this field have entered the race to reduce their production further and laid the foundations of today’s Microelectromechanical systems using different production methods. Studies in this field started in 1959. Microfluidic chip systems are designed at micro levels, and there are channels through which electric current can go. It is defined as a group of canals or an integrated circuit in which channels through which fluid, air or heat pass through microfluidic channels range from a few μm to several mm. In the late 1990s, microfluidic devices were created for cell biology applications such as cell and protein separation modelling, cell-based biosensors, culture and research [3, 4]
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