Abstract

This paper presents a novel approach for producing microfluidic motion by loosely focused acoustic waves (generated by piezoelectric zinc oxide thin film). Results show that the acoustic waves generated by radio frequency (r.f.) sources with frequencies corresponding to the thickness-mode resonances of the piezoelectric film are very effective in moving liquid around when the waves are loosely focused. The device operates without any significant temperature increase in the liquid, and will be very attractive for mixing or transporting temperature-sensitive fluids.

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