Abstract

We demonstrate a microfluidic flowmeter based on a polymer whispering gallery mode (WGM) resonant microcavity. The microcavity is fabricated by coating the dye-doped polymer on the capillary tube. The flowmeter measures the flow velocity based on the temperature variation by the thermo-optic effect. The refractive index of the microcavity changes when the temperature decreases, which is caused by air flow cooling down the microcavity. Therefore, the flow of the fluid can be estimated through calculating the wavelength shift of the resonant microcavity. We achieve a sensitivity of 17 p.m./sccm, and the dynamic range up to 50 sccm. This work will provide a platform for microfluidic flowmeter and miniaturized lasers sensing. The flowmeter measures the flow velocity based on the temperature variation by the thermo-optic effect. The refractive index of the microcavity changes when the temperature decreases, which is caused by air flow cooling down the microcavity. Therefore, the flow of the fluid can be estimated through calculating the wavelength shift of the resonant microcavity. • The flowmeter measures the flow velocity based on the thermo-optic effect. • The changes of fluid flow can be read out optically using a microfluidic flowmeter through calculating the wavelength shift in the resonant microcavity.

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