Abstract

Flow control is central to microfluidics and chromatography. With decreasing dimensions and high pressures, precise fluid flows are often needed. In this paper, a high-pressure flow control system is presented, allowing for the miniaturization of chromatographic systems and the increased performance of microfluidic setups by controlling flow, composition, and relative permittivity of two-component flows with CO2. The system consists of four chips: two flow actuator chips, one mixing chip, and one relative permittivity sensor. The actuator chips, throttling the flow, required no moving parts as they instead relied on internal heaters to change the fluid resistance. This allows for flow control using miniaturized fluid delivery systems containing only a single pump or pressure source. Mobile phase gradients between 49% and 74% methanol in CO2 were demonstrated. Depending on how the actuator chips were dimensioned, the position of this range could be set for different method-specific needs. With the microfluidic control board, both flow and composition could be controlled from constant pressure sources, drift could be removed, and variations in composition could be lowered by 84%, resulting in microflows of CO2 and methanol with a variation in the composition of ±0.30%.

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