Microfluid Ejection Device Based on Complementary Metal–Oxide–Semiconductor Technology as an Artificial Synapse

Abstract

A complementary metal–oxide–semiconductor (CMOS)-based multisite microfluid ejection device was fabricated and demonstrated. An array of microreservoir cells integrated with micropumps was fabricated on this device. Microfluid ejection is based on the actuation of a silicone membrane between the microreservoir and the micropump cell. This membrane was actuated by the gas produced during the electrolysis of water. The device was equipped with a CMOS chip as an addressable electrode array for multisite microfluid ejection. The microfluid ejection cell array was configured on the CMOS chip to realize addressable microfluid ejection. We measured the membrane displacement to characterize the performance of the micropump, and successfully demonstrated microfluid ejection. The volume of the ejected microfluid was nearly proportional to injected charge. These results suggest that the proposed microfluid ejection device is a promising platform for artificial synaptic devices for various scientific and clinical applications.