Abstract

The purpose of this paper is to fabricate phase gratings inside bulk polymethylmethacrylate (PMMA) more productively by femtosecond laser processing with a computer generated hologram (CGH). We aim at to develop high-throughput micromachining methods by femtosecond laser pulses using a CGH. The CGH transforms input femtosecond laser intensity distribution into an arbitrary intensity distribution such as dot-array and straight-line. Our method with a CGH has a key advantage over “direct-writing” which involves a lot of sequential processing steps to move and stop the sample stage. In the grating fabrication, we had a good result: the CGH reduced the throughput time by about 0.5%.The purpose of this paper is to fabricate phase gratings inside bulk polymethylmethacrylate (PMMA) more productively by femtosecond laser processing with a computer generated hologram (CGH). We aim at to develop high-throughput micromachining methods by femtosecond laser pulses using a CGH. The CGH transforms input femtosecond laser intensity distribution into an arbitrary intensity distribution such as dot-array and straight-line. Our method with a CGH has a key advantage over “direct-writing” which involves a lot of sequential processing steps to move and stop the sample stage. In the grating fabrication, we had a good result: the CGH reduced the throughput time by about 0.5%.

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