Abstract
This paper report the microfabrication process of cesium (Cs) vapor cells using low-temperature wafer bonding process and its activation by a krypton fluoride (KrF) excimer laser. Low-temperature process with sequential plasma process for Si/glass anodic bonding enables to encapsulate cesium azide (CsN 3 ) in the cell below its melting point and reduce presence of impurities inside the cavities, leading good quality of spectroscopic measurement for MEMS atomic clocks. To obtain atomic Cs, a decomposition of C s N 3 was done by exposure with a KrF excimer laser. The short-term frequency stability demonstrated the potential of fabricated Cs-filled cell to be used in MEMS atomic clocks.
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