Abstract
The cooling arm plays an important role in the production process of fusion energy. The structure is designed with 16 fingers and is simulated by the finite-element method. The (111) crystal orientation silicon is deployed to fabricate a cooling arm, because of its isotropic Young's modulus. It can make the fingers generate a uniform force. The silicon also has a large thermal conductivity of 2400 W/mK measured by a Gifford-McMahon cooler, which contributes to heat transfer. The cooling arm is fabricated by the microfabrication process, and it has a high sidewall vertical degree of 90 ± 0.5° measured by scanning electron microscopy. The mechanical testing result shows that the maximum stress of the clamping arm was 0.209 GPa when it was in gripping state. The maximum stress is far smaller than the yield strength of 7 GPa of silicon material.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
