Abstract
We are developing high performance X-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices with an energy resolution of 4.5/spl plusmn/0.1 eV for 5.9 keV X-rays, the best reported energy resolution for any energy dispersive detectors in this energy range. These detectors utilize micromachined thermal isolation structures and transition-edge sensors fabricated from Mo/Cu bilayers with normal-metal boundary conditions. We have found the normal-metal boundary conditions to be critical to stable and reproducible low noise operation. In this paper we present details of fabrication and performance of these devices.
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