Abstract
A thermal absolute pressure sensor of the heated microbridge type has been integrated with an active bias circuit and an 8-b successive approximation register analog/digital (A/D) converter. The chip, which contains about 1000 devices, is sensitive to variations in absolute gas pressure between 10 and 10/sup 4/ Pa, and it is implemented in a 4-Um NMOS technology merged with the microsensor process. The output of the chip is a robust digital signal adequate for transmission in high noise environments. >
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