Microfabricated Structures for the Measurement of Adhesion and MechanicaL Properties of Polymer Films

Abstract

Two microfabricated structures for the measurement of adhesion and mechanical properties of polymer films, suspended membranes and ‘island’ structures, are described. Measurement of the load-deflection characteristic of the suspended membrane allows determination of the film’s Young’s modulus and residual stress. Increasing the load on the suspended membrane until the film debonds allows a blister test measurement of the adhesion of the film. The island structure is a modification of the blister test which allows measurement of film adhesion at lower loads, thus overcoming the tensile strength limitation of conventional blister or peel tests.