Microelectronics processing education using the Internet

Abstract

Integrated circuits (ICs) are fabricated by a sophisticated series of process steps. A complete education in the field of semiconductor processing requires a thorough understanding of the fabrication process. However, due to space, equipment, and budget constraints, hands-on microelectronics instruction is usually limited, despite high student demand. To alleviate these resource limitations and to enhance the educational experience, an environment which simulates IC fabrication instruction in a physical laboratory using interactive multimedia is currently being developed at the Georgia Institute of Technology Microelectronics Research Center. This Virtual Cleanroom will allow students to use a high-performance workstation (equipped with the necessary audio, video and graphics capability) to simulate the fabrication of an IC. Simulation modules for each of the unit process steps used in IC fabrication are being constructed on the X-Mosaic platform, thereby making the courseware accessible through Internet via the World-Wide Web. This has allowed the incorporation of a variety of other IC process simulators into the Virtual Cleanroom environment, enabling the student to visualize the results of performing a step while simultaneously learning the physical activities involved.