Microelectronic Design with Integrated Magnetic and Piezoelectric Structures

Abstract

This thesis investigates the possibility of integrating the standard CMOS design process with additional microstructures enhancing circuit functionalities. More specifically, the thesis faces the problem of miniaturization of magnetic and piezoelectric devices mostly focused on the application field of EH (Energy Harvesting) systems and ultra-low power and ultra-low voltage systems. It shows all the most critical aspects which have to be taken into account during the design process of miniaturized inductors for PwrSoC (Power System on Chip) or transformers. Furthermore it shows that it is possible to optimize the inductance value and also performances by means of a proper choice of the size of the planar core or choosing a different layout shape such as a serpentine shape in place of the classic toroidal one. A new formula for the correct evaluation of the MPL (Magnetic Path Length) was also introduced. Concerning the piezoelectric counterpart, it is focused on the design and simulation of various MEMS PTs based on a SOI (Silicon on Insulator) structure with AlN (Alluminum Nitride) as active piezoelectric element, in perspective of having a SoC with embedded MEMS devices and circuitry. Furthermore it demonstrates for the first time the use of a PT (Piezoelectric Transformer) for ultra-low voltage EH applications. A new boost oscillator based on a discrete PZT (Lead Zirconate Titanate) PT instead of a MT (Magnetic Transformer) has been modelled and tested on a circuit made up by discrete devices, showing performances comparable to commercial solutions like the LTC3108 from Linear. Furthermore this novel boost oscillator has been designed in a 0.35μm technology by ST Microelectronics, showing better performances as intuitively expected by the developed mathematical model of the entire system.