Abstract
A structure integrating a sharp field emission tip inside a coaxial structure with an overall diameter as small as 60 μm is described. It can emit nA electron current with a minimum kinetic energy of 50 eV. It is demonstrated that this structure behaves like an electron gun and is able to produce a low-energy, divergent and highly coherent electron beam at distances as small as 100 μm from the tip.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
