Abstract
Previously, we developed a simple microeconomic model that directly links metrology, yield, and profitability. The model has been used to explain the effect of metrology on gross margins in 200 mm and 300 mm factories. The same model can be adapted to evaluate the relative economic impact of accelerated design-rule shrinks in demand-limited markets. Using examples relevant to the high-volume production of memory products, we demonstrate that metrology-driven shrinks are still the most cost-effective way to improve profitability. We also describe the means by which these shrinks can be achieved in high-volume factories.
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