Abstract
A microdisplacement sensor that measures displacement with a 0.1 μm resolution and covers 0 to 100 mm range has been developed using a polarization-maintaining optical fiber. The compact sensor probe, which has a wide operating temperature range, is suitable for applications in the machining industry. This sensor eliminates the influence of the reflected light from the incident end of an optical fiber whose optical path length is larger than the coherence length of the semiconductor laser fight. The incident optical system with a rod lens fixed to the optical fiber provides a high incident efficiency and a large misalignment tolerance.
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