Abstract
A technique for microdetermination of titanium on the developed silicon surface is suggested. In this technique, thin titanium layers are dissolved in an aqueous solution of hydrofluoric acid and then the resulting solutions are analyzed using potentiometric cells made of perfluorinated proton-conducting membranes. The feasibility of estimation of titanium on the silicon surface in amounts of 5 × 10−7 mol or less is demonstrated.
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