Abstract
The micro-defects evolution of (Al 0 . 33 Cr 0 . 21 Fe 0 . 28 Zr 0.18 )O 2 and (Al 0 . 33 Cr 0 . 2 Mn 0 . 09 Fe 0 . 22 Zr 0.16 )O 2 thin films irradiated with low energy (60 eV) hydrogen ions (H + ) is investigated through Transmission Electron Microscopy (TEM) and the slow positron Doppler broadening spectroscopy (DBS) technique in this work. The results revealed that some perfect dislocation loops with Burgers vector b = a/2<1 1 0> were observed as the quaternary (Al 0 . 33 Cr 0 . 21 Fe 0 . 28 Zr 0.18 )O 2 irradiated with a fluence of 5.2 × 10 22 cm −2 . The micro defects are mainly vacancy (V), hydrogen vacancy complex (i.e. H–V complex), and vacancy dislocation loops. However, after the fluence increased to 1.2 × 10 23 cm −2 , the phase of (Al 0 . 33 Cr 0 . 21 Fe 0 . 28 Zr 0.18 )O 2 transformed from FCC structure to amorphous, suggesting that the weak ionic bonds between the cations with O. The defects mainly exist as large amounts of hydrogen bubbles, some H–V complex and few voids. As the addition of little Mn element, the phase of quinary (Al 0 . 33 Cr 0 . 2 Mn 0 . 09 Fe 0 . 22 Zr 0.16 )O 2 was unstable and easily produce precipitate under the irradiation temperature. And the micro-defects in (Al 0 . 33 Cr 0 . 2 Mn 0 . 09 Fe 0 . 22 Zr 0.16 )O 2 irradiated with 5.2 × 10 22 cm −2 mainly exist as V, H–V complex and some vacancy clusters. While the fluence increase to 1.2 × 10 23 cm −2 , the defects mainly exist as H–V complex and hydrogen bubbles. • The defects evolution of the two HEOs induced by H + irradiation behave differently. • The ionic bonds between the cations with O in (Al 0 . 33 Cr 0 .. 21 Fe 0 . 28 Zr 0.18 )O 2 are weak. • As the addition of Mn, the phase of (Al 0 . 33 Cr 0 . 2 Mn 0 . 09 Fe 0 . 22 Zr 0.16 )O 2 was unstable. • Hydrogen diffuse into both the surface and inner direction of films.
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