Microchemical Systems and Their Applications Workshop Held on 16-18 June 1999 in Reston, Virginia

Abstract

Abstract : This report summarizes presentations, discussions and conclusions from the Workshop, Microchemical Systems and Their Applications, held June 16-18, 1999, in Reston, Virginia USA. The objectives were to establish: (i) for which application areas microreactors would have potential, (ii) essential scientific problems that would have to be solved to realize particular devices, and (iii) the time scale for developing microreactor technologies. The workshop also reviewed fabrication techniques beyond standard silicon based MEMS processes and incorporating metals, polymer, and ceramics. The workshop participants reflected the multidisciplinary nature of microchemical system research and represented government, industry and university organizations. The format consisted of invited talks reviewing the state-of-the-art in microchemical systems, application needs, and relevant fabrication issues. These issues were further elaborated upon in a poster session. The presentations and posters were followed by three breakout sessions addressing specific objectives of the workshop, specifically (1) Opportunities for microenergy devices, (2) Challenges and needs in microfabrication and materials, and (3) Chemical applications of microchemical systems. Promising applications of microreaction technology were identified along with needs for microreaction technology research and development. The report contains of an executive summary, background information, summaries from the working group, and copies of presentations and posters.