Abstract
A microbubble-probe whispering gallery mode resonator with high displacement resolution and spatial resolution for displacement sensing is proposed. The resonator consists of an air bubble and a probe. The probe has a diameter of ∼5 µm that grants micron-level spatial resolution. Fabricated by a CO2 laser machining platform, a universal quality factor of over 106 is achieved. In displacement sensing, the sensor exhibits a displacement resolution of 74.83 pm and an estimated measurement span of 29.44 µm. As the first microbubble probe resonator for displacement measurement, the component shows advantages in performance, and exhibits a potential in sensing with high precision.
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